Contents:
Film Properties
Physical Properties of Solid Material
Evaporation Parameters
Evaporation Procedure
Applications
Forms and Sizes Available

SCANDIUM OXIDE, Sc₂O₃
FOR OPTICAL COATING

 
Introduction
Scandium oxide, Sc₂O₃, produces high-index film layers that are transparent to wavelengths as short as 225 nm in the UV region. The films are insoluble and hard.

Film Properties
Scandium oxide films require an electron-beam source to reach evaporation temperature. Amorphous films can be deposited below 150° C substrate temperature.

Region of Transparency	~250 nm to >5 µm
Refractive index	1.95 at 300 nm 1.90 at 400 nm 1.85 at 500-700 nm

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Physical Properties of Solid Material

Molecular Weight	137.91
Melting Point	2300° C
Color	White
Crystal Density	3.86 g/cc

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Evaporation Parameters

Electron Beam Source Container	Graphite
Pressure	~5 x 10-5 Torr.
Rate	<5 Å/sec.
Substrate Temperature	200-250° C.

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Evaporation Procedure
Keep the material in a dry atmosphere, preferably heated to reduce moisture adsorption. Precondition with a low power sweep until spitting and outgassing subside as a rate of 1Å/sec is approached (~15 min). Evaporation is by sublimation. Continue sweeping to prevent burrowing.

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Applications
The high index value, transparency, and layer hardness make scandium oxide suitable for the high index component of UV, AR and bandpass coatings. High damage thresholds have been reported for combinations with silicon dioxide or magnesium fluoride for use in AR, beamsplitters, and bandpass filter coatings at 248 nm and 351 nm.

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Forms and Sizes Available

Item No.	Purity	Description
S-1184	99.99%	3-12 mm sintered pieces
S-1187	99.9%	3-12 mm sintered pieces

CERAC offers other particle sizes for evaporation as well as sputtering targets. To view pricing on the items listed above, please visit our on-line catalog and look-up by item number or chemical name. If you require a custom manufactured item, please contact our sales department at 414-289-9800 or ceracsales@beminc.com with your specific requirements. You can also fill out our quotation request form.

Phone:  414-289-9800 /  FAX: 414-289-9805  /   ceracinfo@beminc.com